Highest Efficiency Fresnel Zone Plates
Technical record / 0004
Fresnel Zone Plates (FZPs) are diffractive optical elements that focus X-rays through constructive interference, enabling nanoscale imaging resolution limited only by the outermost zone width. Our FZPs are fabricated using state-of-the-art nanolithography techniques including electron-beam lithography, electroplating, and ALD.
Through careful material selection — gold, nickel, iridium, diamond — combined with optimized zone profiles (blazed, multi-step, or binary), our FZPs achieve diffraction efficiencies up to 55% in the soft X-ray range and 15% in the hard X-ray range.
Fabricated with high-energy electron-beam lithography and advanced electroplating, our zone plates achieve aspect ratios exceeding 20:1.
What Sets This Product Apart
Technical Details
- 01Outermost Zone Width: Down to 7 nm (line-doubled Ir), 15–50 nm (standard)
- 02Zone Plate Diameter: 0.05 – 10 mm (custom larger available)
- 03Aspect Ratio: Up to 20:1 (HSQ template + ALD coating)
- 04Materials: Au, Ni, Ir, Pt, Cr, Ru, Si, SiO₂, Diamond
- 05Efficiency: >55% (Ni at 7 keV), >15% (Ir/Al₂O₃ at 8 keV)
- 06Energy Range: 50 eV – 20 keV
- 07Fabrication: e-beam lithography + electroplating (Au/Ni), ALD (Ir)
- 08Zone Profile Options: Binary, multi-step, blazed
- 09Substrate: Si₃N₄ membrane, diamond, or Si
- 10Resolution: Down to 9 nm line pairs demonstrated
Where It Excels
- 01Scanning transmission X-ray microscopy (STXM)
- 02Full-field transmission X-ray microscopy (TXM)
- 03Synchrotron beamline nanofocusing
- 04X-ray fluorescence (XRF) microscopy
- 05Free-electron laser (FEL) focusing
- 06X-ray astronomy and plasma diagnostics
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