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X-ray optics

Highest Efficiency Fresnel Zone Plates

Advanced Diffractive Optics for X-Ray Focusing

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Highest Efficiency Fresnel Zone Plates
Outermost Zone Width
Down to 7 nm (line-doubled Ir), 15–50 nm (standard)
Zone Plate Diameter
0.05 – 10 mm (custom larger available)
Aspect Ratio
Up to 20:1 (HSQ template + ALD coating)

Overview

Technical record / 0018

Fresnel Zone Plates (FZPs) are diffractive optical elements that focus X-rays through constructive interference, enabling nanoscale imaging resolution limited only by the outermost zone width. Our FZPs are fabricated using state-of-the-art nanolithography techniques including electron-beam lithography, electroplating, and ALD.

Through careful material selection — gold, nickel, iridium, diamond — combined with optimized zone profiles (blazed, multi-step, or binary), our FZPs achieve diffraction efficiencies up to 55% in the soft X-ray range and 15% in the hard X-ray range.

Fabricated with high-energy electron-beam lithography and advanced electroplating, our zone plates achieve aspect ratios exceeding 20:1.

Key Features

What Sets This Product Apart

01World-record resolution with line-doubled Ir zone plates down to 7 nm
02Broad material selection optimized for specific energy ranges
03Blazed and multi-step profiles for maximum diffraction efficiency
04High aspect ratio structures (20:1) for hard X-ray performance
05Customizable diameter, focal length, and substrate
06Proven performance at major synchrotron facilities worldwide
Specifications

Technical Details

Outermost Zone Width
Down to 7 nm (line-doubled Ir), 15–50 nm (standard)
Zone Plate Diameter
0.05 – 10 mm (custom larger available)
Aspect Ratio
Up to 20:1 (HSQ template + ALD coating)
Materials
Au, Ni, Ir, Pt, Cr, Ru, Si, SiO₂, Diamond
Efficiency
>55% (Ni at 7 keV), >15% (Ir/Al₂O₃ at 8 keV)
Energy Range
50 eV – 20 keV
Fabrication
e-beam lithography + electroplating (Au/Ni), ALD (Ir)
Zone Profile Options
Binary, multi-step, blazed
Substrate
Si₃N₄ membrane, diamond, or Si
Resolution
Down to 9 nm line pairs demonstrated
Applications

Where It Excels

Synchrotron & beamlinesMicroscopy & imagingSpace & radiationSpectroscopy
  • 01Scanning transmission X-ray microscopy (STXM)
  • 02Full-field transmission X-ray microscopy (TXM)
  • 03Synchrotron beamline nanofocusing
  • 04X-ray fluorescence (XRF) microscopy
  • 05Free-electron laser (FEL) focusing
  • 06X-ray astronomy and plasma diagnostics
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